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DCE(Trans-1,2 -Dichloroethylene)
| Product name | DCE(Trans-1,2 -Dichloroethylene) | ||||
| CAS No. | 156-60-5 | ||||
| Appearance | Colorless Transparent Liquid | ||||
| Properties | Flammable, keep away from oxidants. Density (water=1) 1.26kg/l; Melting point -50 ℃. Flash point 2 ℃ | ||||
| Use | Used for silicon wafer oxidation and furnace tube cleaning in industries such as semiconductors, discrete devices, and MEMS. | ||||
| Package | Quartz source bottle or coated quartz source bottle (Bubbler), equipped with PTFE valve. | ||||
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